failure to respond or late response
on 19 May 2006
Last Applicant/ Owned by
6142 Nancy Ridge Drive Suite 102
San Diego
CA
92121
Serial Number
76634075 filed on 22nd Mar 2005
Registration Number
N/A
Filing Basis
1. use application currently
Disclaimer
NO DATA
optical metrology product that provides an accurate measurement of the Numerical Aperture of a lithography tool and variation of same across the stepper or scanner exposure field, by utilizing an instrument that fits in a standard reticle/pellicle envelope, and a software package that processes the wafer images
optical metrology product that provides an accurate measurement of the Numerical Aperture of a lithography tool and variation of same across the stepper or scanner exposure field, by utilizing an instrument that fits in a standard reticle/pellicle envelope, and a software package that processes the wafer images
01st Feb 2005
17th Feb 2005
No 76634075
No Service/Collective Mark
No
No
No
No
No
No
No
No
No
Status Date | Action Taken |
---|---|
19th May 2006 | ABANDONMENT NOTICE MAILED - FAILURE TO RESPOND |
19th May 2006 | ABANDONMENT - FAILURE TO RESPOND OR LATE RESPONSE |
21st Oct 2005 | NON-FINAL ACTION WRITTEN |
21st Oct 2005 | NON-FINAL ACTION E-MAILED |
17th Oct 2005 | ASSIGNED TO EXAMINER |
01st Apr 2005 | NEW APPLICATION ENTERED IN TRAM |